Process cooling is crucial in the semiconductor industry. It is responsible for maintaining a stable operating temperature of equipment and materials during the production process, preventing performance degradation or damage caused by overheating, and ensuring the accuracy and yield of chip manufacturing. By effectively dissipating heat, process cooling systems support high-performance operation and long-term reliability of semiconductor devices.

Process cooling systems in the semiconductor industry usually consist of coolants (such as water or special chemical liquids), heat exchangers, circulation pumps, temperature and pressure sensors, control systems, and connecting pipes. These components work together to precisely control the temperature during chip manufacturing to ensure process stability and product quality.